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Nanocrystalline Silicon (nc-Si:H) And Amorphous Silicon (a ...
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LPCVD Silicon-rich Silicon Nitride films For Applications ...
LPCVD Silicon-rich Silicon Nitride films For Applications In Micromechanics, Studied With Statistical Experimental Design* J. G. E. Gardeniersa) And H. A. C. Tilmansb) MESA Research Institute, University Of Twente, P.O. Box 217, NL-7500 AE Enschede, The Netherlands 4th, 2024

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Interferometric Thickness Calibration Of 300 Mm Silicon Wafers
Fused Silica Wafer With IR3 And Compared The Results With Thickness Variation Measurements Made With NIST’s XCALIBIR Interferometer Which Is A 300 Mm Aperture, Phase-shifting Fizeau Interferometer Working At A Wavelength Of 633 Nm. Fused Silica Is A Stable And Well-characteriz 8th, 2024

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